High Sensitive Quartz Crystal Microphone using Micro-Machining Technology
نویسندگان
چکیده
منابع مشابه
Quartz Crystal Micro– Balance Gas Sensor with Ink–jet Printed Nano– Diamond Sensitive Layer
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2001
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.121.629